PolyScanner

Thin Film Metrology

Powerful Metrology Platform for Thickness Mapping

3D Thickness Mapping

Spatial measurements and not only single points

High spatial resolution

HD imaging

Fast

1 sample with 1M measurement points in 10s

Robust

Robust against vibrations and temperature changes, independent of surface roughness

Single- and multi-layer

Measurement of single- and multi-layer films

Software Features

Recipe editor

Transparent and certifiable recipes

Industrial

Supports industry standards

Platform-independent

Runs on all major platforms (Windows, Linux, Intel, ARM)

Algorithms

Machine Learning algorithms

Product Videos

Technical Specifications

The system allows measurements in the lab and at-line.

Sample size: 20x20x3 cm.

Technology: Spatially resolved reflectometry

Thickness range: 50nm – 3mm

Resolution: <1% of measurement value

Repeatability: <1% of measurement value

Accuracy: <1% of measurement value

The PolyScanner system comes with powerful LuxFlux software

Sensor tailored to application covering wavelength range from 400 to 1700 nm

Homogeneous and diffuse light source optimized for application

Linear stage for lab environment

    Testimonials

    "PolyScanner helps us to monitor production processes"
    Client
    Germany
    "PolyScanner is a versatile and valuable measurement instrument"
    Client
    Japan