PolyScanner
Thin Film Metrology
Powerful Metrology Platform for Thickness Mapping
3D Thickness Mapping
Spatial measurements and not only single points
High spatial resolution
HD imaging
Fast
1 sample with 1M measurement points in 10s
Robust
Robust against vibrations and temperature changes, independent of surface roughness
Single- and multi-layer
Measurement of single- and multi-layer films
Software Features
Recipe editor
Transparent and certifiable recipes
Industrial
Supports industry standards
Platform-independent
Runs on all major platforms (Windows, Linux, Intel, ARM)
Algorithms
Machine Learning algorithms
Product Videos
Technical Specifications
The system allows measurements in the lab and at-line.
Sample size: 20x20x3 cm.
Technology: Spatially resolved reflectometry
Thickness range: 50nm – 3mm
Resolution: <1% of measurement value
Repeatability: <1% of measurement value
Accuracy: <1% of measurement value
The PolyScanner system comes with powerful LuxFlux software
Sensor tailored to application covering wavelength range from 400 to 1700 nm
Homogeneous and diffuse light source optimized for application
Linear stage for lab environment
Applications
Testimonials
"PolyScanner helps us to monitor production processes"
Client
Germany
"PolyScanner is a versatile and valuable measurement instrument"
Client
Japan
