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Patent Protected Technology

PolyScanner

Inline Metrology for Thin Film Process Control

Powerful Metrology Platform for Thin Films

  Thickness Mapping

Spatial measurements and not only single points

  High Spatial Resolution

HD imaging

  Speed

1 wafer with 1M measurement points in 10s.

  Robust

Robust against vibrations and temperature changes, independent of surface roughness

  Single- and Multi-layer

Measurement of single- and multi-layer films

PolyScanner Features

Camera

  • Wavelength range from 400 -950 nm
  • Line Scan

Light

  • Diffuse
  • Homogeneous
  • Broad band

Compute unit

  • Industrial CPU

Software

  • Supports industry standards
  • GigE vision compliant

Construction

  • Robust

Add-ons

  • Application software optional
polyscanner product image

Technical specifications

Technology: Spatially resolved reflectometry

Thickness range: 50nm – 20μm

Resolution: 1280 Pixel

Repeatability: typically ±1 nm

Accuracy: typically ±3 nm 

Scan width: 250mm

Frame rate: 600fps

Wavelength Range: 400nm - 950nm

Application Notes

Served Industries

Photovoltaics

(e.g. Perovskites)

Semiconductors

(e.g. Chiplets)

Batteries

Displays

Measurement types

Thickness

Color

Moisture

Surface Properties

Testimonials

Hear from our customers

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PolyScanner helps us to monitor production processes

3D football with the flag of Germany - isolated over a white background
Germany
Client
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PolyScanner is a versatile and valuable measurement instrument

3D soccer ball with the flag of USA - isolated over a white background
U.S.A.
Client

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