--- title: PolyScanner --- [Skip to main content](https://www.polyscanner.com#main) [![LuxFlux_Logo-No-BG_RGB](https://www.polyscanner.com/hs-fs/hubfs/LuxFlux_Logo-No-BG_RGB.png?width=250&height=92&name=LuxFlux_Logo-No-BG_RGB.png) ![LuxFlux_Logo-No-BG_RGB](https://www.polyscanner.com/hs-fs/hubfs/LuxFlux_Logo-No-BG_RGB.png?width=250&height=92&name=LuxFlux_Logo-No-BG_RGB.png) ![LuxFlux_Logo-No-BG_RGB](https://www.polyscanner.com/hs-fs/hubfs/LuxFlux_Logo-No-BG_RGB.png?width=250&height=92&name=LuxFlux_Logo-No-BG_RGB.png) ![LuxFlux_Logo-No-BG_RGB](https://www.polyscanner.com/hs-fs/hubfs/LuxFlux_Logo-No-BG_RGB.png?width=250&height=92&name=LuxFlux_Logo-No-BG_RGB.png)](https://www.luxflux.de/en/start/) - [PolyScanner](https://www.polyscanner.com) Open main navigation Close main navigation - [PolyScanner](https://www.polyscanner.com) - Search Search Patent Protected Technology # PolyScanner Inline Metrology for Thin Film Process Control ## Powerful Metrology Platform for Thin Films ##   Thickness Mapping Spatial measurements and not only single points ##   High Spatial Resolution HD imaging ##   Speed 1 wafer with 1M measurement points in 10s. ##   Robust Robust against vibrations and temperature changes, independent of surface roughness ##   Single- and Multi-layer Measurement of single- and multi-layer films ## PolyScanner Features ## Camera - Wavelength range from 400 -950 nm - Line Scan ## Light - Diffuse - Homogeneous - Broad band ## Compute unit - Industrial CPU ## Software - Supports industry standards - GigE vision compliant ## Construction - Robust ## Add-ons - Application software optional ![polyscanner product image](https://www.polyscanner.com/hs-fs/hubfs/polyscanner%20product%20image.png?width=400&height=400&name=polyscanner%20product%20image.png "polyscanner product image") [Technical Drawings](https://www.polyscanner.com/hubfs/PSI-PV-C%20Drawing%20v1.pdf?hsLang=en) ## Technical specifications Technology: Spatially resolved reflectometry Thickness range: 50nm – 20μm Resolution: 1280 Pixel Repeatability: typically ±1 nm Accuracy: typically ±3 nm  Scan width: 250mm Frame rate: 600fps Wavelength Range: 400nm - 950nm ## Application Notes [Sign up for update notifications](https://share.hsforms.com/1IADfZVh3RCCzl76P-brvHw3r1ng) - [![Printed brain onto circuit board](https://www.polyscanner.com/hs-fs/hubfs/Printed%20brain%20onto%20circuit%20board.jpeg?width=1000&height=667&name=Printed%20brain%20onto%20circuit%20board.jpeg) **Thin Film Inspection**](https://www.polyscanner.com/hubfs/AN_PolyScannerThinfilm.pdf?hsLang=en) ## Served Industries ## Photovoltaics (e.g. Perovskites) ## Semiconductors (e.g. Chiplets) ## Batteries ## Displays ## Measurement types ## Thickness ## Color ## Moisture ## Surface Properties ## Testimonials Hear from our customers left-quote Created with Sketch. PolyScanner helps us to monitor production processes ![3D football with the flag of Germany - isolated over a white background](https://www.polyscanner.com/hs-fs/hubfs/3D%20football%20with%20the%20flag%20of%20Germany%20-%20isolated%20over%20a%20white%20background.jpeg?width=100&height=99&name=3D%20football%20with%20the%20flag%20of%20Germany%20-%20isolated%20over%20a%20white%20background.jpeg) ###### Germany Client left-quote Created with Sketch. PolyScanner is a versatile and valuable measurement instrument ![3D soccer ball with the flag of USA - isolated over a white background](https://www.polyscanner.com/hs-fs/hubfs/3D%20soccer%20ball%20with%20the%20flag%20of%20USA%20-%20isolated%20over%20a%20white%20background.jpeg?width=100&height=100&name=3D%20soccer%20ball%20with%20the%20flag%20of%20USA%20-%20isolated%20over%20a%20white%20background.jpeg) ###### U.S.A. Client ## Contact Us ![LuxFlux_Logo-No-BG_RGB](https://www.polyscanner.com/hs-fs/hubfs/LuxFlux_Logo-No-BG_RGB.png?width=250&height=92&name=LuxFlux_Logo-No-BG_RGB.png) ©2026 LuxFlux GmbH. All rights reserved. [Privacy Policy   ](https://www.luxflux.de/de/datenschutzerklaerung/)[Imprint](https://www.luxflux.de/en/imprint/) - -