PolyScanner
Spatial measurements and not only single points
HD imaging
1 sample with 1M measurement points in 10s
Robust against vibrations and temperature changes, independent of surface roughness
Measurement of single- and multi-layer films
Transparent and certifiable recipes
Supports industry standards
Runs on all major platforms (Windows, Linux, Intel, ARM)
Machine Learning algorithms
The system allows measurements in the lab and at-line.
Sample size: 20x20x3 cm.
Technology: Spatially resolved reflectometry
Thickness range: 50nm – 3mm
Resolution: <1% of measurement value
Repeatability: <1% of measurement value
Accuracy: <1% of measurement value
The PolyScanner system comes with powerful LuxFlux software
Sensor tailored to application covering wavelength range from 400 to 1700 nm
Homogeneous and diffuse light source optimized for application
Linear stage for lab environment
Your name
Your email
Subject
Your message (optional)