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Patent Protected Technology

PolyScanner

Thin Film Metrology

Powerful Metrology Platform for Thin Films

  Thickness Mapping

Spatial measurements and not only single points

  High Spatial Resolution

HD imaging

  Speed

1 wafer with 1M measurement points in 10s.

  Robust

Robust against vibrations and temperature changes, independent of surface roughness

  Single- and Multi-layer

Measurement of single- and multi-layer films

PolyScanner Features

Camera

  • Wavelength range from 400 -950 nm
  • Line Scan

Light

  • Diffuse
  • Homogeneous
  • Broad band

Compute unit

  • Industrial CPU

Software

  • Supports industry standards
  • GigE vision compliant

Construction

  • Robust

Add-ons

  • Application software optional
polyscanner product image

Technical specifications

Technology: Spatially resolved reflectometry

Thickness range: 50nm – 20μm

Resolution: 1280 Pixel

Repeatability: typically ±1 nm

Accuracy: typically ±3 nm 

Scan width: 250mm

Frame rate: 600fps

Wavelength Range: 400nm - 950nm

Served Industries

Photovoltaics

(e.g. Perovskites)

Semiconductors

(e.g. Chiplets)

Batteries

Displays

Application

Application Notes

Measurement types

Thickness

Color

Moisture

Surface Properties

Testimonials

Hear from our customers

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PolyScanner helps us to monitor production processes

3D football with the flag of Germany - isolated over a white background
Germany
Client
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PolyScanner is a versatile and valuable measurement instrument

3D soccer ball with the flag of USA - isolated over a white background
U.S.A.
Client

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